Scanning Electron MIcroscope Mira3 GMU


The TESCAN ORSAY HOLDING MIRA3 GMU is a variable-pressure field emission SEM using advanced technology, such as new improved high-performance electronics for fast image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations. The MIRA3 utilizes unique 4-lens electron optical design that provides a wide range of imaging and scanning modes, including: high resolution imaging (Resolution mode), ultra-low magnification imaging (Wide Field mode), high depth of field imaging (Depth mode), Live 3D Stereoscopic imaging, and Selected Area Electron Channeling (beam rocking for acquisition of electron diffraction images).  The Mira3 SEM  is fitted with dual Energy Dispersive Spectrometer system with large area elemental mapping capabilities and 3D surface rendering system as well as with a confocal Raman microscope for comprehensive correlative sample analysis.

The MIRA3 GMU was acquired with funding from the US Department of Defense to Dr. David Kisailus and it has been installed in November 2016.


51E MS&E Building, UC Riverside main campus

Electron Optics

High Brightness Schottky field emitter
4-lens electron optical design

Resolution at High-vacuum SE mode
     1.2 nm at 30 kV
     2.5 nm at 3 kV
Resolution at High-vacuum In-Beam SE mode
     1 nm at 30  kV
Resolution in low-vacuum mode LVSTD
     1.5 nm at 30 kV
Resolition in Beam Deceleration Mode
     1.5 nm at  3kV
     2.5 nm at  200V
Maximum Field of View
     100 mm
     20 mm at 30 mm WD

          Everhard-Thornley SE/BSE (ETD)
          Retractable BSE Detector
          In-Beam BSE Detector
          In-Beam SE Detector
          Low Vacuum Secondary Electron TESCAN Detector (LVSTD)
Analytical Systems

          Bruker Nano GmbH QUANTAX 400 Energy Dispersive X-ray Spectrometer with
           Dual 60 mmXFlash® detectors
           Resolution  126 eV Mn Kα, 60 eV F Kα, 51 eV C Kα
           Element detection range from beryllium (4) to americium (95)

          QUANTAX 400 is a universal EDS system for qualitative and quantitative microanalysis of specimens with polished
          or irregular surfaces, that incorporates sixth generation XFlash® Silicon Drift Detector and provides
          extremely high throughput rates and improved light element detection capabilities. 


         Witec GmbH RISE laser confocal microscope system.
         Laser: excitation wavelength: 532 nm, power 75 mW
         Spectrometer UHTS 300

        RISE Microscopy is combination of confocal Raman Imaging and Scanning Electron
        Microscopy. It incorporates the sensitivity of the non-destructive, spectroscopic
        Raman technique along with the atomic resolution of electron microscopy. Raman
        Imaging enables the identification of molecules, their allotropes and polymorphs,
        the determination of their orientation, purity and crystallinity, and the detection of
        strain states.