University of California, Riverside

Central Facility for Advanced Microscopy and Microanalysis

Scanning Electron Microscope TESCAN MIRA3 GMU


The TESCAN MIRA3 GMU is a field emission SEM using the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations. The MIRA3 utilizes unique 4-lens electron optical design that provides a wide range of imaging and scanning modes, including: high resolution imaging (Resolution mode), ultra-low magnification imaging (Wide Field mode), high depth of field imaging (Depth mode), Live 3D Stereoscopic imaging, and Selected Area Electron Channeling (beam rocking for acquisition of electron diffraction images).  The system is fitted with dual Energy Dispersive Spectrometer system with large area elemental mapping capabilities and 3D surface rendering system.

The MIRA3 GMU was acquired with funding from the US Departmnet of Defense to Dr. David Kisailus and it has been installed in November 2016.


51E MS&E Building, UC Riverside main campus

Electron Optics

High Brightness Schottky field emitter
4-lens electron optical design

Resolution at High-vacuum SE mode
     1.2 nm at 30 kV
     2.5 nm at 3 kV
Resolution at High-vacuum In-Beam SE mode
     1 nm at 30  kV
Resolution in low-vacuum mode LVSTD
     1.5 nm at 30 kV
Resolition in Beam Deceleration Mode
     1.5 nm at  3kV
     2.5 nm at  200V
Maximum Field of View
     100 mm
     20 mm at 30 mm WD􀀡􀀚􀀣􀀚􀀞􀀠􀀟􀀯􀀝􀀛􀀄􀀮􀀝􀀜􀀚 􀀕􀀷􀀃􀀄􀀛􀀮􀀄􀀠􀀟􀀄􀀪􀀄􀀳􀀒 􀀕􀀷􀀙􀀄􀀛􀀮􀀄􀀕􀀄􀀳􀀒 􀀦􀀷􀀃􀀄􀀛􀀮􀀄􀀠􀀟􀀄􀀦􀀖􀀖􀀄􀀒􀀇􀀠􀀬􀀯􀀮􀀭􀀮􀀄􀀽􀀯􀀚􀀣􀀜􀀄􀀝􀀽􀀄

          Everhard-Thornley SE/BSE (ETD)
          Retractable BSE Detector
          In-Beam BSE Detector
          In-Beam SE Detector
          Low Vacuum Secondary Electron TESCAN Detector (LVSTD)

Analytical System

           Bruker Nano GmbH QUANTAX 400 Energy Dispersive X-ray Spectrometer with Dual 60 mmXFlash® detectors
           Resolution  126 eV Mn Kα, 60 eV F Kα, 51 eV C Kα
           Element detection range from beryllium (4) to americium (95)

          QUANTAX 400 is a universal EDS system for qualitative and quantitative microanalysis of specimens with polished
          or irregular surfaces, that incorporates sixth generation XFlash® Silicon Drift Detector and provides
          extremely high throughput rates and improved light element detection capabilities. 

More Information 

General Campus Information

University of California, Riverside
900 University Ave.
Riverside, CA 92521
Tel: (951) 827-1012

Contact Information

Central Facility for Advanced Microscopy and Microanalysis
B116 Bourns Hall

Tel: (951) 827-2998

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